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F10700 - SEMI F107 - Guide for Process Equipment Adapter Plates Revision:SEMI F107-0309 - Inactive orgで,そして2009年11月にCD-ROMで入手可能となる。初版は2007年7月発行,前版は2009年3月に発行された。

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Description

orgで,そして2009年11月にCD-ROMで入手可能となる。初版は2007年7月発行,前版は2009年3月に発行された。

SEMI E109-1110 (designation update)

This Standard addresses the functional requirements for a generic Carrier ID Reader/Writer interface with an upstream controller

Assets to be secured (Equipment Information Asset)

1  This Specification describes a method for data acquisition EDA Applications to request process and data from equipment to be communicated in an automated fashion by the equipment

F10700 - SEMI F107 - Guide for Process Equipment Adapter Plates Revision:SEMI F107-0309 - Inactive orgで,そして2009年11月にCD-ROMで入手可能となる。初版は2007年7月発行,前版は2009年3月に発行された。This standard was technically approved by the global Facilities Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. It was available at www. semi. org in February 2009. The purpose of the process equipment adapter plate guide is to provide guidance on the expectations and application for process equipment adapter plates. The use of adapter plates has been shown to reduce the time and cost

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